ZR-based metallic glass as a novel MEMS bonding material

Y. C. Lin, J. Froemel, P. Sharma, A. Inoue, M. Esashi, T. Gessner

    研究成果: Conference contribution

    1 被引用数 (Scopus)

    抄録

    In this study, for the first time we successfully bonded Si substrates with sputtered Zr-Al-Cu-Ni metallic glassy material. The surface pre-treatment with formic acid vapor plays a remarkable function for oxides removal before bonding. Metallic glasses have fundamentally glassy structure and exhibit a Newtonian viscous flow in the supercooled liquid region. The polymer-like plastic fluidity performs superior wettability which improves interfacial integrity. This paper introduces a unique functional material and reveals its high potential for MEMS bonding application.

    本文言語English
    ホスト出版物のタイトル2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
    ページ509-512
    ページ数4
    DOI
    出版ステータスPublished - 2011
    イベント24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
    継続期間: 2011 1 232011 1 27

    出版物シリーズ

    名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    ISSN(印刷版)1084-6999

    Other

    Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    国/地域Mexico
    CityCancun
    Period11/1/2311/1/27

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料
    • 凝縮系物理学
    • 機械工学
    • 電子工学および電気工学

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