Zero-order-free, multilayer-coated laminar grating in the 31 nm region

Mitsunori Toyoda, Noboru Miyata, Mihiro Yanagihara, Makoto Watanabe

    研究成果: Article査読

    5 被引用数 (Scopus)

    抄録

    A laminar holographic grating was coated with a Mo/Si multilayer and the grating efficiency was measured between 27 and 35 nm for an incidence angle of 10°. The zero order was almost suppressed by the negative interference due to the groove profile. The maximum efficiency of first order was 4.8% at 31 nm. It was also found that the spectral wavelength provided by the grating at 10° incidence ranges from 28 nm to 32 nm.

    本文言語English
    ページ(範囲)2066-2067
    ページ数2
    ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    37
    4 PART A
    DOI
    出版ステータスPublished - 1998

    ASJC Scopus subject areas

    • 工学(全般)
    • 物理学および天文学(全般)

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