XY-stage for scanning media for optical data storage

Minoru Sasaki, Fuminori Bono, Kazuhiro Hane

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

XY-stage driven by the electrostatic comb-drive actuator is fabricated realizing long displacement. The actuator is fabricated in one layer of silicon-on-insulator (SOI) wafer, and the media plate is in the other layer. The raster scanning of the plate is realized maintaining orthogonal xy-directions. The fast scanning is y-axis. Two 820×950μm2-size media plates are driven at the opposite y directions canceling the inertia force. The static maximum displacements are 110μm (geometrical limit) along x-axis and 90μm along y-axis. At the resonance, 115μm (geometrical limit) is obtained along y-axis.

本文言語English
ホスト出版物のタイトルIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
出版社IEEE Computer Society
ページ36-37
ページ数2
ISBN(印刷版)078039562X, 9780780395626
DOI
出版ステータスPublished - 2006 1月 1
イベントIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States
継続期間: 2006 8月 212006 8月 24

出版物シリーズ

名前IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

OtherIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
国/地域United States
CityBig Sky, MT
Period06/8/2106/8/24

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学

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