TY - GEN
T1 - XY-stage for scanning media for optical data storage
AU - Sasaki, Minoru
AU - Bono, Fuminori
AU - Hane, Kazuhiro
PY - 2006/1/1
Y1 - 2006/1/1
N2 - XY-stage driven by the electrostatic comb-drive actuator is fabricated realizing long displacement. The actuator is fabricated in one layer of silicon-on-insulator (SOI) wafer, and the media plate is in the other layer. The raster scanning of the plate is realized maintaining orthogonal xy-directions. The fast scanning is y-axis. Two 820×950μm2-size media plates are driven at the opposite y directions canceling the inertia force. The static maximum displacements are 110μm (geometrical limit) along x-axis and 90μm along y-axis. At the resonance, 115μm (geometrical limit) is obtained along y-axis.
AB - XY-stage driven by the electrostatic comb-drive actuator is fabricated realizing long displacement. The actuator is fabricated in one layer of silicon-on-insulator (SOI) wafer, and the media plate is in the other layer. The raster scanning of the plate is realized maintaining orthogonal xy-directions. The fast scanning is y-axis. Two 820×950μm2-size media plates are driven at the opposite y directions canceling the inertia force. The static maximum displacements are 110μm (geometrical limit) along x-axis and 90μm along y-axis. At the resonance, 115μm (geometrical limit) is obtained along y-axis.
KW - Electrostatic actuator
KW - Long displacement
KW - Media plate
KW - XY-stage
UR - http://www.scopus.com/inward/record.url?scp=34247469326&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34247469326&partnerID=8YFLogxK
U2 - 10.1109/omems.2006.1708252
DO - 10.1109/omems.2006.1708252
M3 - Conference contribution
AN - SCOPUS:34247469326
SN - 078039562X
SN - 9780780395626
T3 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
SP - 36
EP - 37
BT - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
PB - IEEE Computer Society
T2 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Y2 - 21 August 2006 through 24 August 2006
ER -