X-ray topography using the forward transmitted beam under multiple-beam diffraction conditions

Y. Tsusaka, S. Takeda, H. Takano, K. Yokoyama, Y. Kagoshima, J. Matsui

研究成果: Article査読

7 被引用数 (Scopus)

抄録

X-ray topographs are taken for a sapphire wafer with the [0001] surface normal, as an example, by forward transmitted synchrotron x-ray beams combined with two-dimensional electronic arrays in the x-ray detector having a spatial resolution of 1 μm. They exhibit no shape deformation and no position shift of the dislocation lines on the topographs. Since the topography is performed under multiple-beam diffraction conditions, the topographic images of a single diffraction (two-wave approximation condition) or plural diffractions (six-wave approximation condition) can be recorded without large specimen position changes. As usual Lang topographs, it is possible to determine the Burgers vector of each dislocation line. Because of high parallelism of the incoming x-rays and linear sensitivity of the electronic arrays to the incident x-rays, the present technique can be used to visualize individual dislocations in single crystals of the dislocation density as high as 1 × 105 cm-2.

本文言語English
論文番号023701
ジャーナルReview of Scientific Instruments
87
2
DOI
出版ステータスPublished - 2016 2 1
外部発表はい

ASJC Scopus subject areas

  • 器械工学

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