Total-reflection X-ray fluorescence analysis is usually carried out using a single X-ray beam to irradiate a sample surface at a glancing angle from one direction. We have attempted to conduct X-ray fluorescence analysis using multiple glancing X-ray beams emitted from a glow discharge X-ray tube. Fe characteristic X-rays were used as the primary X-rays to irradiate a thin Cr film (sample) on a flat acrylic carrier at multiple glancing angles. We have concluded that multiple X-ray beam excitation is an effective method for enhancement of X-ray fluorescence intensity.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 1998 10月|
ASJC Scopus subject areas