Wireless magnetic micromachine of planar structure with magnetic thin film

Aya Yamazaki, Masahiko Sendoh, Kazushi Ishiyama, Ken Ichi Arai

研究成果: Article査読

7 被引用数 (Scopus)

抄録

Magnetic micromachines are driven by a magnetic field. They require no power supply cables, no batteries, and no controlling systems on the body of the machine. The magnetic micromachine of planar structure was fabricated with magnetic thin film. The size of this micromachine is 30 × 60 × 12 μm. The micromachine swam at the rotational frequency of 1-10 Hz in the water with a kinematic viscosity of 1 mm2 /s and a Reynolds number of 0.1-1. The magnetic torque required for rotating the micromachine was very small, and it was clarified that the value could be realized with a magnetic thin film.

本文言語English
ページ(範囲)4021-4023
ページ数3
ジャーナルIEEE Transactions on Magnetics
41
10
DOI
出版ステータスPublished - 2005 10月

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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