This paper presents precision measurement of a micro-part which has micro-structured surfaces. Micro-parts sometimes have short pitches and large amplitudes. Measurements are conducted by the use of conventional measuring instruments and found that these instruments are difficult to measure their profiles. A novel measuring system is presented which uses a contact-type displacement sensor, probe shaft of which is levitated by air-bearings to reduce the contact force. After developing the new measuring system, measurement and analysis results are shown. Wavelet analysis reveals that there are errors in the measurement results and they are caused by stylus jump.
|出版ステータス||Published - 2011|
|イベント||6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan|
継続期間: 2011 11月 8 → 2011 11月 10
|Other||6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011|
|City||Omiya Sonic City, Saitama|
|Period||11/11/8 → 11/11/10|
ASJC Scopus subject areas