Wavelet analysis for precision measurement of a micro-part

Toshiki Takeishi, Xu Bin, Yuki Shimizu, Wei Gao

研究成果: Paper査読

抄録

This paper presents precision measurement of a micro-part which has micro-structured surfaces. Micro-parts sometimes have short pitches and large amplitudes. Measurements are conducted by the use of conventional measuring instruments and found that these instruments are difficult to measure their profiles. A novel measuring system is presented which uses a contact-type displacement sensor, probe shaft of which is levitated by air-bearings to reduce the contact force. After developing the new measuring system, measurement and analysis results are shown. Wavelet analysis reveals that there are errors in the measurement results and they are caused by stylus jump.

本文言語English
出版ステータスPublished - 2011
イベント6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama, Japan
継続期間: 2011 11月 82011 11月 10

Other

Other6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
国/地域Japan
CityOmiya Sonic City, Saitama
Period11/11/811/11/10

ASJC Scopus subject areas

  • 産業および生産工学

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