Wafer-level heterointegration technologies for MEMS-based communication devices

Shuji Tanaka, Masayoshi Esashi

研究成果: Paper査読

1 被引用数 (Scopus)
本文言語English
出版ステータスPublished - 2010
イベントSystems Integration 2010 - 4th European Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components - Como, Italy
継続期間: 2010 3 232010 3 24

Other

OtherSystems Integration 2010 - 4th European Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components
国/地域Italy
CityComo
Period10/3/2310/3/24

ASJC Scopus subject areas

  • 電子工学および電気工学

引用スタイル