Visualization of 50 MHz surface acoustic wave propagation using stroboscopic phase-shift interferometry

Ken Nakano, Kazuhiro Hane, Shigeru Okuma, Tadashi Eguchi

研究成果: Article査読

17 被引用数 (Scopus)

抄録

A stroboscopic phase-shift interferometry has been developed to visualize surface acoustic wave (SAW) propagation on SAW devices quantitatively. The developed interferometry is a Fizeau-type one with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Fifty MHz SAW propagation on the surface of the SAW device has been measured with the interferometry. Distribution of the SAW along the propagation path has been observed, whose amplitude is 3 nm (p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. The system is useful for estimating and improving performances of micro-devices.

本文言語English
ページ(範囲)265-269
ページ数5
ジャーナルOptical Review
4
2
DOI
出版ステータスPublished - 1997 1月 1

ASJC Scopus subject areas

  • 原子分子物理学および光学

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