Visible luminescence of nanocrystalline AlN:Er thin film by co-deposition of AlN, Er, and SiO₂

We report a visible luminescence of Er³⁺ ions in an amorphous-nanocrystalline AlN:Er thin film prepared by co-deposition using AlN, Er, and SiO₂ targets. A PL emission spectrum of Er³⁺ in the AlN:Er film annealed at 750 °C showed a strong bluish green emission of Er³⁺ in the amorphous-nanocrystalline AlN:Er thin film, which is attributed to the intra-4fEr³⁺ transitions of ²H_11/2 → ⁴I_15/2 and ⁴F_7/2 → ⁴I_15/2. It was found that crystallite diameters were between 3 and 5 nm by high-resolution transmission electron microscopy. The occurrence of the strong Er³⁺ emission in the annealed AlN:Er thin film with a mixture of amorphous and nanocrystalline phases may be contributed to an increase in the number of excitation Er³⁺ centers and a presence of oxygen related to Er³⁺ excitation and recombination process in the AlN:Er thin film.