抄録
An aspheric wave-front recording system was designed to produce a holographic grating for use in a standard soft X-ray flat-field spectrograph interchangeably with a mechanically ruled varied-line-spacing (VLS) grating. The grating grooves recorded with the designed aspheric wave-front recording system were processed to form a laminar groove profile by means of reactive ion etching. Measurements done with synchrotron radiation and a laboratory X-ray source are reported for this laminar-type grating and a commercial grating replicated from a mechanically ruled VLS grating that was specifically designed and fabricated for the standard soft X-ray flat-field spectrograph. The laminar-type holographic grating is found to have an absolute first-order efficiency of approximately 10% for wavelengths of approximately 4.5-12 nm. It is also shown that the holographic grating is effective in suppressing the higher orders and stray-light level for soft X-ray of 4.36 nm (C-K) and has a comparable spectral resolution to the replica VLS grating.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 163-170 |
| ページ数 | 8 |
| ジャーナル | Proceedings of SPIE - The International Society for Optical Engineering |
| 巻 | 4146 |
| 号 | 1 |
| DOI | |
| 出版ステータス | Published - 2000 11 8 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering