Ferromagnetic resonance (FMR) was observed for Co82Pt12 films with various process. And relation between effective damping factor (αeff) and compositional modulation (CM) in the atomic layers, and other magnetic properties to investigate the relationship between local variation of the magnetic properties and the αeff. The CM was changed by the substrate temperature Tsub and deposition rate of the Co-Pt alloy film. As a result, it was found that 1) For the Tsub dependence, αeff took maximum value of 0.22 at Tsub = 200 °C. 2) For the rate dependence, aeff linearly increases with 0.12 to 0.35 with increasing deposition rate from 0.3 to 2.0 nm/sec. 3) There was no similar tendency between aeff and CM for the Co-Pt alloy film with Tsub and rate change. Thus the CM is not dominant factor of the aeff for the compositionally modulated Co-Pt alloy film.
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