Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism

Syotaro Abe, Kazuhiro Hane

研究成果: Article査読

17 被引用数 (Scopus)

抄録

Design and fabrication of a variable-gap waveguide coupler switch with a nano latch mechanism are reported for on-chip waveguide circuits in Si photonics. The proposed switch consists of a coupler of two freestanding 400-nm-wide 260-nm-thick Si waveguides, three 30-μm-wide 40-μm-long comb-drive actuators, and a nanolatch mechanism. The nanolatch mechanism consists of four hook-shaped latches for maintaining a switch-on state at a coupler gap of around 100 nm. The switching and latching characteristics are investigated. The port isolation under the latch-on condition is found to be 17 dB. Due to the capacitive operation of the actuators and the nanolatch mechanism, power consumption of the switch is minimized.

本文言語English
論文番号6472777
ページ(範囲)675-677
ページ数3
ジャーナルIEEE Photonics Technology Letters
25
7
DOI
出版ステータスPublished - 2013 4 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 電子工学および電気工学

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