Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

So Ito, Yuan Liu Chen, Yuki Shimizu, Hirotaka Kikuchi, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi

研究成果: Article査読

11 被引用数 (Scopus)

抄録

A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm.

本文言語English
ページ(範囲)525-529
ページ数5
ジャーナルPrecision Engineering
43
DOI
出版ステータスPublished - 2016 1月

ASJC Scopus subject areas

  • 工学(全般)

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