Ultrasonic atomic force microscopy with real time mapping of resonance frequency and Q factor

Kazushi Yamanaka, Hiroshi Irihama, Toshihiro Tsuji, Keiichi Nakamoto

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and the loss modulus may be evaluated from Q the factor. This paper describes recent progress on the theoretical model, subsurface imaging, inverse analysis, nonlinearity due to a dislocation, and theory and experiment of Q control for improving resolution and stability.

本文言語English
ページ(範囲)85-92
ページ数8
ジャーナルProceedings of SPIE-The International Society for Optical Engineering
4703
DOI
出版ステータスPublished - 2002 1 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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