Ultrasonic atomic force microscope with overtone excitation of cantilever

Kazushi Yamanaka, Shizuka Nakano

研究成果: Article査読

144 被引用数 (Scopus)

抄録

We propose a novel atomic force microscope (AFM) combined with ultrasonic frequency vibration of a cantilever excited at its support. This method enables both topography and elasticity imaging of stiff samples such as metals and ceramics, without a need for bonding a transducer to the sample. When the sample surface is contacted with a tip attached to the cantilever, the cantilever vibration mode is changed according to the sample properties. It is theoretically predicted that the amplitude and resonant frequency of vibration at higher-order modes are useful parameters for elasticity evaluation of stiff samples. A preliminary experimental verification of this principle is presented using a glass-fiber-reinforced plastic sample. Clear elastic contrast was successfully obtained using a soft cantilever only when it was vibrated at MHz frequency higher-order modes.

本文言語English
ページ(範囲)3787-3792
ページ数6
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
35
6 SUPPL. B
DOI
出版ステータスPublished - 1996 6月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

フィンガープリント

「Ultrasonic atomic force microscope with overtone excitation of cantilever」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル