Ultra-precision scanning tunneling microscope for measurement of high-aspect ratio structures

Shigeaki Goto, Wei Gao

研究成果: Conference contribution

抄録

This paper presents an ultra-precision STM system that consists of an STM probe, a long stroke PZT actuator, and a linear encoder. The linear encoder yields a resolution of 0.5 nm over a full stroke of the actuator (70 μm), generating a dynamic range of 102.9 dB. The linearity error of the developed STM system is smaller than 5 nm over a range of 50 μm. Measurement experiment was carried out by using the STM system. The result was compared with that of using an AFM and that by a commercial SEM.

本文言語English
ホスト出版物のタイトル10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
ページ489-492
ページ数4
出版ステータスPublished - 2010 12 1
イベント10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 - Osaka, Japan
継続期間: 2010 9 52010 9 9

出版物シリーズ

名前10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010

Other

Other10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
CountryJapan
CityOsaka
Period10/9/510/9/9

ASJC Scopus subject areas

  • Safety, Risk, Reliability and Quality

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