Ultra-high speed video capturing of time dependent dielectric breakdown of metal-oxide-silicon capacitor up to 10M frame per second

F. Shao, D. Kimoto, K. Furukawa, H. Sugo, T. Takeda, K. Miyauchi, Y. Tochigi, R. Kuroda, S. Sugawa

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

In this paper, the ultra-high speed (UHS) video capturing results of time dependent dielectric breakdown (TDDB) of MOS capacitors using the UHS camera with the maximum frame rate of 10M frame per second (fps) are reported. In order to capture the breakdown, we set a trigger circuit which detects the rapid current increase through the MOS capacitor. Some movies have succeeded to capture the intermittent light emissions on some points of the gate during the breakdown. From the movies taken at 100K to 1M fps, the distribution centers of the light emission time and the period were 10 sec and 30 μsec, respectively. From the movies taken at 10M fps, the light emission time and the period were less than 10 μsec. The random failure mode has higher percentage of single light emissions than that of the wear-out failure mode, indicating a correlation between of the light emission mode and the TDDB failure mode.

本文言語English
ホスト出版物のタイトルProceedings of SPIE-IS and T Electronic Imaging - Image Sensors and Imaging Systems 2014
出版社SPIE
ISBN(印刷版)9780819499394
DOI
出版ステータスPublished - 2014
イベントImage Sensors and Imaging Systems 2014 - San Francisco, CA, United States
継続期間: 2014 2 52014 2 6

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
9022
ISSN(印刷版)0277-786X
ISSN(電子版)1996-756X

Other

OtherImage Sensors and Imaging Systems 2014
国/地域United States
CitySan Francisco, CA
Period14/2/514/2/6

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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