Two-dimensional analysis of carrier distribution in phosphorus-implanted emitter and phosphorus-diffused emitter using super-higher-order scanning nonlinear dielectric microscopy

Kotaro Hirose, Katsuto Tanahashi, Hidetaka Takato, Norimichi Chinone, Yasuo Cho

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Two-dimensional carrier distributions in phosphorus (P)-implanted emitter and P-diffused emitter were analyzed using super-higher-order scanning nonlinear dielectric microscopy (SHO-SNDM). The carrier distribution was clearly visualized and quantified using calibration sample. P-type, n-type and depletion layer was discriminated from local capacitance-voltage characterization obtained from SHO-SNDM measurement. The n-type region and depletion layer distribution depended on the surface texture. The position of p-n junction was estimated near the p-type region in depletion layer. The n-type region and depletion layer distribution was thicker in P-implanted emitter than P-diffused emitter.

本文言語English
ホスト出版物のタイトル2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016
出版社Institute of Electrical and Electronics Engineers Inc.
ページ3671-3674
ページ数4
ISBN(電子版)9781509027248
DOI
出版ステータスPublished - 2016 11 18
イベント43rd IEEE Photovoltaic Specialists Conference, PVSC 2016 - Portland, United States
継続期間: 2016 6 52016 6 10

出版物シリーズ

名前Conference Record of the IEEE Photovoltaic Specialists Conference
2016-November
ISSN(印刷版)0160-8371

Other

Other43rd IEEE Photovoltaic Specialists Conference, PVSC 2016
国/地域United States
CityPortland
Period16/6/516/6/10

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 産業および生産工学
  • 電子工学および電気工学

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