Tunable monocrystalline silicon grating on LSI circuit fabricated by two-step polymer bonding

T. Sasaki, T. Suzuki, H. Matsuura, K. Hane

研究成果: Conference contribution

抄録

This paper shows a fabrication process and device characteristics of the tunable monocrystalline silicon grating on LSI circuit. The thin monocrystalline silicon with thickness of 260 nm was transferred on the LSI circuit, by using the two-step polymer bonding process consisting of polymer patterning and bonding, and liquid-polymer filling. Furthermore, the grating was fabricated on the LSI circuit and the actuation of the grating by serial communication with the LSI circuit was demonstrated.

本文言語English
ホスト出版物のタイトル2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
出版社IEEE Computer Society
ISBN(電子版)9781509010356
DOI
出版ステータスPublished - 2016 9 13
イベント21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
継続期間: 2016 7 312016 8 4

出版物シリーズ

名前International Conference on Optical MEMS and Nanophotonics
2016-September
ISSN(印刷版)2160-5033
ISSN(電子版)2160-5041

Other

Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
国/地域Singapore
CitySingapore
Period16/7/3116/8/4

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料

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