Triple Mass Resonator with High Capacity to Tune Frequency and Quality Factor

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

This paper reports a novel triple mass resonator (TMR) consisting of two tuning fork type outer masses and an inner mass, which could increase capacity to tune the quality factor (Q-factor). Q-factor related to the anchor loss (QAnchor) could be controlled by electrostatic softening on springs connected to the inner mass, while the resonant frequency of anti-phase mode was almost constant. In contrast, when the DC bias was applied to the outer mass, the resonance frequency could be tuned same as conventional electrostatic softening. The experimental results showed the Q-factor decrease as large as 64.8% could be obtained by the DC bias of 15 V at the inner electrode, while the frequency change was as small as 278 ppm. On the other hand, when the bias was applied to the outer mass, frequency drop as high as 4429 ppm and Q-factor change as small as 9.8% could be obtained. By the proposed method, both Q-factor and resonance frequency could be controlled by the DC biases applied to the inner and outer masses, respectively.

本文言語English
ホスト出版物のタイトルINERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781728129839
DOI
出版ステータスPublished - 2020 3月
イベント7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020 - Hiroshima, Japan
継続期間: 2020 3月 232020 3月 26

出版物シリーズ

名前INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
国/地域Japan
CityHiroshima
Period20/3/2320/3/26

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学
  • 安全性、リスク、信頼性、品質管理
  • 電子材料、光学材料、および磁性材料
  • 制御と最適化
  • 器械工学
  • 原子分子物理学および光学

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