Tribological properties of TiN/DLC nanocomposite coatings

Won Jae Yang, Tohru Sekino, Jong Won Yoon, Kwang Bo Shim, Koichi Niihara, Keun Ho Auh

研究成果: Article査読

抄録

The TiN/DLC nanocomposite coatings were grown on Si wafers using Ar/CH 4/TDMAT (Ti[(CH3)2N]4N2) gas mixtures by r.f. plasma enhanced chemical vapor deposition. The sliding friction tests were carried out using a ball-on-flat type tribometer. The different test parameters such as applied loads, counterpart materials and environment were applied to understand the tribological behavior in terms of friction and wear. The coatings provided a low friction coefficient and high wear resistance depending on the friction test conditions.

本文言語English
ページ(範囲)385-388
ページ数4
ジャーナルKey Engineering Materials
317-318
出版ステータスPublished - 2006 1 1
外部発表はい

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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