The TiN/DLC nanocomposite coatings were grown on Si wafers using Ar/CH 4/TDMAT (Ti[(CH3)2N]4N2) gas mixtures by r.f. plasma enhanced chemical vapor deposition. The sliding friction tests were carried out using a ball-on-flat type tribometer. The different test parameters such as applied loads, counterpart materials and environment were applied to understand the tribological behavior in terms of friction and wear. The coatings provided a low friction coefficient and high wear resistance depending on the friction test conditions.
|ジャーナル||Key Engineering Materials|
|出版ステータス||Published - 2006 1 1|
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