Transparent conducting properties of Re-doped β -MoO3 films

Kuniko Yamamoto; Ryota Shimizu; Susumu Shiraki; Taro Hitosugi

doi:10.1063/1.4963154

Transparent conducting properties of Re-doped β -MoO₃ films

Kuniko Yamamoto, Ryota Shimizu, Susumu Shiraki, Taro Hitosugi

研究成果: Article › 査読

6 被引用数 (Scopus)

抄録

We report the significant increase in the electrical conductivity, by five orders of magnitude, of Re-doped β-MoO₃ epitaxial films grown using reactive DC magnetron sputtering. Re atoms were successfully incorporated into the films by using Mo-Re alloy targets, although the film compositions deviated significantly from those of the targets. Pristine β-MoO₃ exhibited a conductivity below 10^-7 S/cm, whereas β-Mo_0.982Re_0.018O₃ exhibited a conductivity of 1.2 × 10^-2 S/cm and a high optical transmittance of 67% (average) in the visible region. Furthermore, transparent conducting properties were reproduced in a polycrystalline film grown on a glass substrate, indicating the high potential of these films for use as transparent conductors.

本文言語	English
論文番号	096104
ジャーナル	APL Materials
巻	4
号	9
DOI	https://doi.org/10.1063/1.4963154
出版ステータス	Published - 2016 9月 1

ASJC Scopus subject areas

材料科学（全般）
工学（全般）

文献へのアクセス

10.1063/1.4963154

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引用スタイル

@article{0996eb0e9ce04b9099d5b31459788633,

title = "Transparent conducting properties of Re-doped β -MoO3 films",

abstract = "We report the significant increase in the electrical conductivity, by five orders of magnitude, of Re-doped β-MoO3 epitaxial films grown using reactive DC magnetron sputtering. Re atoms were successfully incorporated into the films by using Mo-Re alloy targets, although the film compositions deviated significantly from those of the targets. Pristine β-MoO3 exhibited a conductivity below 10-7 S/cm, whereas β-Mo0.982Re0.018O3 exhibited a conductivity of 1.2 × 10-2 S/cm and a high optical transmittance of 67% (average) in the visible region. Furthermore, transparent conducting properties were reproduced in a polycrystalline film grown on a glass substrate, indicating the high potential of these films for use as transparent conductors.",

author = "Kuniko Yamamoto and Ryota Shimizu and Susumu Shiraki and Taro Hitosugi",

note = "Funding Information: This research was supported by the World Premier International Research Center Initiative (WPI Initiative) of the Ministry of Education, Culture, Sports, Science and Technology of Japan. The authors also acknowledge the support of the Plansee SE. We thank Dr. J. Winkler, Dr. H. Kstenbauer, and Professor G. Leichtfried for fruitful discussions Publisher Copyright: {\textcopyright} 2016 Author(s).",

year = "2016",

month = sep,

day = "1",

doi = "10.1063/1.4963154",

language = "English",

volume = "4",

journal = "APL Materials",

issn = "2166-532X",

publisher = "American Institute of Physics Publising LLC",

number = "9",

}

TY - JOUR

T1 - Transparent conducting properties of Re-doped β -MoO3 films

AU - Yamamoto, Kuniko

AU - Shimizu, Ryota

AU - Shiraki, Susumu

AU - Hitosugi, Taro

N1 - Funding Information: This research was supported by the World Premier International Research Center Initiative (WPI Initiative) of the Ministry of Education, Culture, Sports, Science and Technology of Japan. The authors also acknowledge the support of the Plansee SE. We thank Dr. J. Winkler, Dr. H. Kstenbauer, and Professor G. Leichtfried for fruitful discussions Publisher Copyright: © 2016 Author(s).

PY - 2016/9/1

Y1 - 2016/9/1

N2 - We report the significant increase in the electrical conductivity, by five orders of magnitude, of Re-doped β-MoO3 epitaxial films grown using reactive DC magnetron sputtering. Re atoms were successfully incorporated into the films by using Mo-Re alloy targets, although the film compositions deviated significantly from those of the targets. Pristine β-MoO3 exhibited a conductivity below 10-7 S/cm, whereas β-Mo0.982Re0.018O3 exhibited a conductivity of 1.2 × 10-2 S/cm and a high optical transmittance of 67% (average) in the visible region. Furthermore, transparent conducting properties were reproduced in a polycrystalline film grown on a glass substrate, indicating the high potential of these films for use as transparent conductors.

AB - We report the significant increase in the electrical conductivity, by five orders of magnitude, of Re-doped β-MoO3 epitaxial films grown using reactive DC magnetron sputtering. Re atoms were successfully incorporated into the films by using Mo-Re alloy targets, although the film compositions deviated significantly from those of the targets. Pristine β-MoO3 exhibited a conductivity below 10-7 S/cm, whereas β-Mo0.982Re0.018O3 exhibited a conductivity of 1.2 × 10-2 S/cm and a high optical transmittance of 67% (average) in the visible region. Furthermore, transparent conducting properties were reproduced in a polycrystalline film grown on a glass substrate, indicating the high potential of these films for use as transparent conductors.

UR - http://www.scopus.com/inward/record.url?scp=84988602609&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84988602609&partnerID=8YFLogxK

U2 - 10.1063/1.4963154

DO - 10.1063/1.4963154

M3 - Article

AN - SCOPUS:84988602609

VL - 4

JO - APL Materials

JF - APL Materials

SN - 2166-532X

IS - 9

M1 - 096104

ER -