Transmission electron microscopy observation of second-phase particles in β-Si3N4 grains

Naoto Hirosaki, Tomohiro Saito, Fumio Munakata, Yoshio Akimune, Yuichi Ikuhara

    研究成果: Article査読

    4 被引用数 (Scopus)


    Silicon nitride was fabricated by adding Y2O3 and Nd2O3 as sintering additives, sintering for 8 h at 1900 °C, and heat treating for 4 h at 2200 °C to enhance grain growth. The microstructure was investigated by scanning electron microscopy, high-resolution electron microscopy, energy dispersive x-ray spectroscopy (EDS), and electron microdiffraction. This material had a duplex microstructure composed of many fine grains and a few coarse grains. In β-Si3N4 grains, second-phase particles with the composition of liquid phase, Y-Nd-Si-O or Y-Nd-Si-O-N, in the size of 10-30 nm were observed. EDS spectra and microdiffraction patterns revealed that those were amorphous or crystalline particles of Y-Nd-apatite, (Y,Nd)10Si6O24N2. These particles were presumably formed during cooling by the precipitation of Y-Nd-Si-O-N, which was trapped in the β-Si3N4 grains as solid solution or trapped liquid. The results suggest that attention should be paid to the trace amounts of trapped elements in β-Si3N4 grains in trying to improve the thermal conductivity of sintered silicon nitride.

    ジャーナルJournal of Materials Research
    出版ステータスPublished - 1999 7

    ASJC Scopus subject areas

    • 材料科学(全般)
    • 凝縮系物理学
    • 材料力学
    • 機械工学


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