Total Dry Electron-Beam Vacuum Lithography System for a Rotary Encoder

Yoshiyuki Uchida, Keiji Matsui, Masatoshi Sago, Kazuhiro Hane, Shinzo Morita, Shuzo Hattori

研究成果: Article › 査読

本文言語	English
ページ（範囲）	391-394
ページ数	4
ジャーナル	Shinku/Journal of the Vacuum Society of Japan
巻	30
号	5
DOI	https://doi.org/10.3131/jvsj.30.391
出版ステータス	Published - 1987 1月
外部発表	はい

ASJC Scopus subject areas

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AU - Morita, Shinzo

AU - Hattori, Shuzo

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