Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium

Keizo Tsukamoto, Tetsuro Tamura, Hiromi Matsusaki, Masahide Tona, Hiroaki Yamamoto, Yuki Nakagomi, Hiroshi Nishida, Yoshihiro Hirai, Nobuo Nishimiya, Masaomi Sanekata, Keijiro Ohshimo, Kiichirou Koyasu, Fuminori Misaizu

研究成果: Article査読

1 被引用数 (Scopus)

抄録

A photoionization method using a vacuum ultraviolet laser was applied to the time-of-flight mass spectrometry of ions formed in high-power pulsed magnetron sputtering (HPPMS). This method is a new plasma diagnostic technique for measuring simultaneously the amounts of sputtered ionized and neutral species in HPPMS. The temporal profiles for the amounts of ions and neutrals were observed with respect to the trigger of the pulsed discharge in HPPMS. This result is discussed in connection with the atomic processes of light-emitting ionized and neutral species measured in optical emission spectroscopy for HPPMS.

本文言語English
論文番号SHHB05
ジャーナルJapanese journal of applied physics
59
DOI
出版ステータスPublished - 2020 5 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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