Time-modulated electron cyclotron resonance plasma discharge for controlling generation of reactive species

Seiji Samukawa, Shuichi Furuoya

研究成果: Article査読

109 被引用数 (Scopus)

抄録

This study examines modulated electron cyclotron resonance (ECR) plasma discharge occurring within a few tens of μs. It can control the generation of reactive species in plasmas. Reactive species are measured by an actinometric optical emission spectroscopy in the pulsed plasma. Good correlation is found between the density ratio of CF2 radicals and F atoms in the CHF 3 plasma, and the combination of the pulse duration and pulse intervals. These characteristics are explained by the dependence of reactive species generation in ECR plasma on a time within a few tens of μs. This method provides for controlling the polymerization during SiO2 etching.

本文言語English
ページ(範囲)2044-2046
ページ数3
ジャーナルApplied Physics Letters
63
15
DOI
出版ステータスPublished - 1993 12 1
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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