Time Evolution of Nucleation and Vertical Growth of Carbon Nanotubes during Plasma-Enhanced Chemical Vapor Deposition

Goo Hwan Jeong, Nobuhiko Satake, Toshiaki Kato, Takamichi Hirata, Rikizo Hatakeyama, Kazuyuki Tohji

研究成果: Article査読

12 被引用数 (Scopus)

抄録

We have investigated the time evolution during nanotube growth and proposed the growth mechanism in order to understand the effects of plasma properties on nanotube formation and controlled growth in the case of plasma-enhanced chemical vapor deposition. The nucleation process of multi-walled carbon nanotubes (MWNTs) firstly takes place through catalyst tip formation. MWNTs grow with a wide diameter distribution at the initial growth stage and finally attain similar diameters as growth proceeds. In addition, ion flux and bombardment energy need to be optimized during the nanotube growth for vertical alignment and a highly crystallized structure.

本文言語English
ページ(範囲)L1340-L1342
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
42
11 A
出版ステータスPublished - 2003 11 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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