Three-dimensional wave optical simulation for image sensors by localized boundary element method

Hideki Mutoh, Shigetoshi Sugawa

研究成果: Article査読

2 被引用数 (Scopus)

抄録

A novel wave optical simulation method [a localized boundary element method (BEM)] has been developed. This method enables us to execute 3-D wave optical simulation with much smaller memory space and much shorter calculation time than conventional BEMs or finite-difference time domain methods. The light gathering power dependence on cell size and microlens height and distance, the color shading characteristics of inner lens structures, and the light gathering power and cross talk of light waveguide were analyzed by this method. A smaller cell needs a shorter focal length microlens, which can be realized by inner lens structures in CCD or the waveguide structures in CMOS image sensors. It is shown that this method can optimize these structures by calculating the color shading dependence on the microlens shape and the cross talk dependence on the waveguide materials. This method was found to be powerful and useful for the 3-D wave optical analysis of image sensors.

本文言語English
ページ(範囲)2473-2480
ページ数8
ジャーナルIEEE Transactions on Electron Devices
56
11
DOI
出版ステータスPublished - 2009 9月 29
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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