TY - CONF
T1 - Three-dimensional structural analysis of polymer/inorganic nanocomposite using FIB-TEMT (focused ion beam - Transmission electron microtomogaraphy)
AU - Kawase, Noboru
AU - Kato, Mitsuro
AU - Okui, Toshiyasu
AU - Nishioka, Hideo
AU - Nishikawa, Yukihiro
AU - Jinnai, Hiroshi
PY - 2005/12/1
Y1 - 2005/12/1
N2 - Transmission electron microtomography (TEMT) has been used to study three-dimensional structure of polymer/ZrO 2 nanocomposite. One of the factors that limits the TEMT resolution is the increase of thickness of a microtome section for electron beam transmission when tilted at high-angle. In order to avoid this phenomenon, a rod-shaped sample with a diameter of ca.150nm was fabricated using focused ion beam (FIB) technique. As the result of the FIB-TEMT, high quality 3-D reconstructed image was obtained. In addition, it was confirmed that the rod-shaped fabrication is effective to improve 3-D reconstructed image resolution especially along the thickness direction.
AB - Transmission electron microtomography (TEMT) has been used to study three-dimensional structure of polymer/ZrO 2 nanocomposite. One of the factors that limits the TEMT resolution is the increase of thickness of a microtome section for electron beam transmission when tilted at high-angle. In order to avoid this phenomenon, a rod-shaped sample with a diameter of ca.150nm was fabricated using focused ion beam (FIB) technique. As the result of the FIB-TEMT, high quality 3-D reconstructed image was obtained. In addition, it was confirmed that the rod-shaped fabrication is effective to improve 3-D reconstructed image resolution especially along the thickness direction.
KW - Forcused ion beam (FIB)
KW - Polymer nanocomposite
KW - Rod-shaped sample
KW - Transmission electron microtomography (TEMT)
KW - ZrO filler
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M3 - Paper
AN - SCOPUS:33645574071
SP - 3201
EP - 3202
T2 - 54th SPSJ Symposium on Macromolecules
Y2 - 20 September 2005 through 22 September 2005
ER -