Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator

Minoru Sasaki, Danick Briand, Wilfried Noell, Nicolaas F. De Rooij, Kazuhiro Hane

研究成果: Article査読

37 被引用数 (Scopus)

抄録

A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and obtainable accuracy of the displacement are examined. Using the lateral dimension control of the bridge and the supporting beams, the vertical positioning is realized based on the planer photolithography. As a demonstration, a vertical comb drive actuator is prepared and its performance is examined.

本文言語English
ページ(範囲)455-461
ページ数7
ジャーナルIEEE Journal on Selected Topics in Quantum Electronics
10
3
DOI
出版ステータスPublished - 2004 5月

ASJC Scopus subject areas

  • 原子分子物理学および光学
  • 電子工学および電気工学

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