Three-dimensional flow dynamics of an argon RF plasma with dc jet assistance: A numerical study

研究成果: Article査読

25 被引用数 (Scopus)


Time-dependent three-dimensional numerical simulation based on a large-eddy simulation approach is conducted to ascertain the complicated thermofluid dynamics of an argon radio-frequency (RF) inductively coupled plasma with a direct-current (dc) plasma jet assistance, considering non-uniform densities and properties in time and space as well as turbulence generation and suppression. Using a combination of numerical schemes suitable to capture vortices, the present simulation successfully shows unsteady behaviour of the plasma as well as wave-like interfaces between a high-temperature flow and a low-temperature flow as a result of the balance of fluid-dynamical instability and a viscous diffusion effect. Small cold vortices generated near a dc jet injector are entrained into and merged with vortices generated around the dc jet. Subsequently, they interact with large vortices in an RF induction coil region, which causes a much more complex vortex structure.

ジャーナルJournal of Physics D: Applied Physics
出版ステータスPublished - 2013 1 9

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 音響学および超音波学
  • 表面、皮膜および薄膜


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