Three-dimensional atom probe analysis of Co-Cr-Ta thin film

J. Nishimaki, K. Hono, N. Hasegawa, T. Sakurai

    研究成果: Article査読

    7 被引用数 (Scopus)

    抄録

    Three-dimensional elemental mappings of Co-Cr-Ta thin film sputter-deposited at 200°C were obtained using a three-dimensional atom probe. We have confirmed that Ta atoms are dissolved in the film homogeneously, and no segregation of Ta was found at the grain boundaries. On the other hand, Cr atoms are inhomogenously dissolved within grains, and it is strongly enriched at the grain boundaries formins a Cr-enriched grain boundary phase with a thickness of approximately 4 nm.

    本文言語English
    ページ(範囲)3095-3097
    ページ数3
    ジャーナルApplied Physics Letters
    69
    20
    DOI
    出版ステータスPublished - 1996 11月 11

    ASJC Scopus subject areas

    • 物理学および天文学(その他)

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