Three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed by using micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can detect by parallel shift and tilt of a seismic mass respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by three dimensional sensor structure.
|出版ステータス||Published - 1995 12月 1|
|イベント||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden|
継続期間: 1995 6月 25 → 1995 6月 29
|Other||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)|
|Period||95/6/25 → 95/6/29|
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