@inbook{19ee675d79bf458cac350e3d76c7eef9,
title = "Thin Films on Silicon",
author = "Simo Er{\"a}nen and Pekka T{\"o}rm{\"a} and Pilar Gonzalez and Xavier Rottenberg and Puurunen, {Riikka L.} and Matti Putkonen and Andreas Vogl and Frode Tyholdt and Hannah Tofteberg and Paul Muralt and Parmanand Sharma and Akihisa Inoue",
year = "2015",
month = jan,
day = "1",
doi = "10.1016/B978-0-323-29965-7.00006-3",
language = "English",
isbn = "9780323299657",
pages = "124--205",
booktitle = "Handbook of Silicon Based MEMS Materials and Technologies",
publisher = "Elsevier Inc.",
}