Thin-film shielded loop coil for RF magnetic field sensing

H. Yurugi, S. Yabukami, M. Yamaguchi, K. I. Arai, N. Masuda, N. Tamaki, H. Tohya

研究成果: Conference article


A new miniature thin-film coil is proposed whose area is as small as 20 μm × 20 μm and is insensitive to electric-field. The coil has multilayer planar shielded loop structure and it is insensitive to electric field, which greatly improves the measurement accuracy, particularly at high frequencies. The miniature flux pickup coil is useful to get high spatial resolution and also to have broad bandwidth response due to high self resonance frequency.

ジャーナルDigests of the Intermag Conference
出版物ステータスPublished - 1999 12 1
イベントProceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99' - Kyongju, South Korea
継続期間: 1999 5 181999 5 21

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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