A new miniature thin-film coil is proposed whose area is as small as 20 μm × 20 μm and is insensitive to electric-field. The coil has multilayer planar shielded loop structure and it is insensitive to electric field, which greatly improves the measurement accuracy, particularly at high frequencies. The miniature flux pickup coil is useful to get high spatial resolution and also to have broad bandwidth response due to high self resonance frequency.
|ジャーナル||Digests of the Intermag Conference|
|出版物ステータス||Published - 1999 12 1|
|イベント||Proceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99' - Kyongju, South Korea|
継続期間: 1999 5 18 → 1999 5 21
ASJC Scopus subject areas
- Electrical and Electronic Engineering