Thin film photodiode with resonant cavity for increasing signal of standing wave detection type interferometer

M. Sasaki, F. Nakai, X. Mi, K. Hane

研究成果: Conference contribution

抄録

Laser interferometry is a well-developed and useful technique having advantages of high accuracy and non-contact measuring method. Many industrial instruments require small sensors having high accuracy and high-speed response. If the laser interferometer can be integrated in a small package meeting the requirements, there are large application areas. The interference signal from the new PD is rather generated by a convolution of two different resonant fields, not by the simple standing wave detection. The incoming light will be in resonance with Fabry-Perot cavity and large optical intensity is stored inside the Si sensing layer. The transmitted light is again back reflected from the reflection mirror, and also generates the resonance field in the Si layer. These two resonance fields interfere with each other resulting in the intensity modulation depending on the outer reflection mirror position.

本文言語English
ホスト出版物のタイトル2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
出版社Institute of Electrical and Electronics Engineers Inc.
ページ25-26
ページ数2
ISBN(電子版)0780375955, 9780780375956
DOI
出版ステータスPublished - 2002
イベントIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
継続期間: 2002 8 202002 8 23

出版物シリーズ

名前2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Other

OtherIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
CountrySwitzerland
CityLugano
Period02/8/2002/8/23

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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