Thickness effect on magnetic properties of nanocrystalline CoFeBN soft magnetic thin films

H. J. Jeon, I. Kim, J. Kim, K. H. Kim, M. Yamaguchi

研究成果: Article査読

11 被引用数 (Scopus)

抄録

The thickness dependence of magnetic properties was examined in nanocrystalline CoFeBN films fabricated by a RF magnetron sputtering method. It was revealed that the coercivity of the films abruptly increased at a critical thickness without any noticeable microstructural difference. In addition, high B, N contents decreased the critical thickness. These behaviors were discussed in connection with residual film stress.

本文言語English
ページ(範囲)382-384
ページ数3
ジャーナルJournal of Magnetism and Magnetic Materials
272-276
I
DOI
出版ステータスPublished - 2004 5

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学

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