Non-stoichiometric titanium carbide (TiCx) plates were prepared by the chemical vapour deposition of TiCl4CCl4H2 system. The relationship between deposition conditions and the composition ratio x was established experimentally and examined through thermodynamic calculations. The composition ratio x decreased with increasing deposition temperature and source gas ratio [ CCl4] [TiCl4 + CC14], agreeing well with the thermodynamic predictions. The experimentally obtained values of x were slightly smaller than the calculated values. This difference was explained by a kinetic reason.
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