Thermal oxidation of outdiffusing SiO with permeating O 2 in a SiO 2 film studied by angle-resolved X-ray photoelectron spectroscopy

Yuji Takakuwa, Mizuhisa Nihei, Nobuo Miyamoto

研究成果: Article査読

55 被引用数 (Scopus)

フィンガープリント

「Thermal oxidation of outdiffusing SiO with permeating O <sub>2</sub> in a SiO <sub>2</sub> film studied by angle-resolved X-ray photoelectron spectroscopy」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds