Thermal conductivities of yttria-stabilized zirconia films measured by a laser-heating AC method

Teiichi Kimura, Takashi Goto

研究成果: Article査読

12 被引用数 (Scopus)

抄録

Yttria-stabilized zirconia (YSZ) films were prepared by a rf magnetron sputtering and a laser chemical vapor deposition (LCVD), and their thermal conductivities were measured using a laser-heating AC method. Sputtered-YSZ films had a dense isotropic microstructure, and the thermal conductivity was almost the same as that of a bulk YSZ. LCVD-YSZ films had an anisotropic columnar microstructure, and the thermal conductivity was 1/3-/4 as that of a bulk YSZ. Such a low-thermal conductivity of LCVD-YSZ films would be caused by nano-gaps between columns and many nano-pores in the columns.

本文言語English
ページ(範囲)129-132
ページ数4
ジャーナルSurface and Coatings Technology
198
1-3 SPEC. ISS.
DOI
出版ステータスPublished - 2005 8 1

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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