TY - GEN
T1 - Thermal analysis of multi-pass laser irradiation on fused silica
AU - Yao, Peng
AU - Huang, Chuanzhen
AU - Wang, Jun
AU - Kuriyagawa, Tsunemoto
PY - 2012
Y1 - 2012
N2 - A rough ground fused silica surface can be ground in a ductile mode by ultra-precision grinding after repairing the surface and subsurface micro cracks (SSMC) by Co2 laser irradiation. In this paper, 2D finite element thermal analysis of unidirectional multi-pass laser irradiation on fused silica was conducted, and the simulation results were compared with the thermal analysis and experiments results of single pass laser irradiation. Thermal analysis results show that the SSMC on the ground fused silica can be repaired and surface roughness can be decreased simultaneously by unidirectinal laser raster scan with a power of 10.5 W, a scan velocity of 0.2 m/s and a scan spacing of 40 μm.
AB - A rough ground fused silica surface can be ground in a ductile mode by ultra-precision grinding after repairing the surface and subsurface micro cracks (SSMC) by Co2 laser irradiation. In this paper, 2D finite element thermal analysis of unidirectional multi-pass laser irradiation on fused silica was conducted, and the simulation results were compared with the thermal analysis and experiments results of single pass laser irradiation. Thermal analysis results show that the SSMC on the ground fused silica can be repaired and surface roughness can be decreased simultaneously by unidirectinal laser raster scan with a power of 10.5 W, a scan velocity of 0.2 m/s and a scan spacing of 40 μm.
KW - Co laser irradiation
KW - Fused silica
KW - Raster scan
KW - Repair
KW - Surface and subsurface micro cracks
KW - Thermal analysis
UR - http://www.scopus.com/inward/record.url?scp=84869458607&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869458607&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.565.621
DO - 10.4028/www.scientific.net/AMR.565.621
M3 - Conference contribution
AN - SCOPUS:84869458607
SN - 9783037854679
T3 - Advanced Materials Research
SP - 621
EP - 626
BT - Advances in Abrasive Technology XV
T2 - 15th International Symposium on Advances in Abrasive Technology, ISAAT 2012
Y2 - 25 September 2012 through 28 September 2012
ER -