Diamond particles were synthesized by a filament assisted CO2 laser induced CVD technique on a silicon substrate in a hydrogen environment. The deposition was carried out using a gaseous mixture of CH4 and H2, which flowed through a beam generator equipped with a tiny orifice and positioned above a refractory filament. The filament was separated 25 mm from the substrate and a cw-CO2 laser was used to irradiate the substrate's surface. The presence of diamond particles on the substrate was confirmed by Raman Spectroscopy and Scanning Electron Microscope. The factors that hindered the synthesis of a continuous diamond film were investigated from the results of EDS, TEM analysis, HREM analysis, and Electron Diffraction Patterns.
|ジャーナル||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|出版ステータス||Published - 1997 1月|
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