The synthesis of diamond particles by a filament assisted CO2 laser induced CVD

Joseph Gaze, Tatsuo Obata, Naoki Oyanagi, Hirosumi Izawa, Weilie Zhou, Michiko Kusunoki, Yuichi Ikuhara

    研究成果: Article査読

    9 被引用数 (Scopus)

    抄録

    Diamond particles were synthesized by a filament assisted CO2 laser induced CVD technique on a silicon substrate in a hydrogen environment. The deposition was carried out using a gaseous mixture of CH4 and H2, which flowed through a beam generator equipped with a tiny orifice and positioned above a refractory filament. The filament was separated 25 mm from the substrate and a cw-CO2 laser was used to irradiate the substrate's surface. The presence of diamond particles on the substrate was confirmed by Raman Spectroscopy and Scanning Electron Microscope. The factors that hindered the synthesis of a continuous diamond film were investigated from the results of EDS, TEM analysis, HREM analysis, and Electron Diffraction Patterns.

    本文言語English
    ページ(範囲)427-431
    ページ数5
    ジャーナルNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
    121
    1-4
    DOI
    出版ステータスPublished - 1997 1

    ASJC Scopus subject areas

    • 核物理学および高エネルギー物理学
    • 器械工学

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