The silicon mold fabrication of a kind of micro-optical resonator and coupler

Ju Hui, Takayuki Ohta, Satoru Takao, Masafumi Ito, Minoru Sasaki, Kazuhiro Hane, Masaru Hori

研究成果: Conference contribution

抄録

We present the fabrication of a kind of hexagonal and triangular cavity mold, which can cast Polymethyl Methacrylate (PMMA) resonators and couplers. The mold is designed on (111) silicon wafer according to its crystal structure and anisotropic etching properties in the etchant of ethylene diamine, pyrocatechol, and water (EDP/EPW), forming sidewalls by six {110} crystal surfaces, which are perpendicular to the (111) plane and constitute precise hexagons and triangles. The RIE-ICP etching is used to define the depth of the triangle and hexagonal cavities, and the following EDP etching smoothes the sidewalls of cavities. Only high temperature EDP etching is proved to be able to get smooth sidewalls. Before etching, the wafer is aligned to the right crystal orientation by pre-etched marks. The etched results of different geometrical cavities are analyzed and discussed based on the crystal structure.

本文言語English
ホスト出版物のタイトルMicromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
DOI
出版ステータスPublished - 2007 5 24
イベントMicromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII - San Jose, CA, United States
継続期間: 2007 1 222007 1 24

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6462
ISSN(印刷版)0277-786X

Other

OtherMicromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
国/地域United States
CitySan Jose, CA
Period07/1/2207/1/24

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

フィンガープリント

「The silicon mold fabrication of a kind of micro-optical resonator and coupler」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル