The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures

Yasunori Saotome, Kenichi Imai, Shigeo Shioda, Susumu Shimizu, Tao Zhang, Akihisa Inoue

研究成果: Article査読

135 被引用数 (Scopus)

抄録

Pt48.75Pd9.75Cu19.5P22 amorphous alloy exhibits obvious glass transition behavior at a temperature of Tg = 502 K, which is below the crystallization temperature Tx = 588 K, and develops a supercooled liquid state in a wide temperature range of ΔTx (= Tx-Tg) = 86 K. The present paper investigates the macroscopic and microscopic deformation behavior of the material and the possibility of micro-nano forming as a fabrication method and material for nano-devices. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, we fabricated V-grooved micro dies of (100) Si by a silicon process. The V-groove dies are from 100 nm to 1 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micro-nanomaterials for micro-nano devices.

本文言語English
ページ(範囲)1241-1247
ページ数7
ジャーナルIntermetallics
10
11-12
DOI
出版ステータスPublished - 2002 11 1

ASJC Scopus subject areas

  • Chemistry(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

フィンガープリント 「The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル