The laser trapping probe for nano-CMM (1st report) - Positional detection principle of the laser trapping probe and its nature

Yasuhiro Takaya, Noriaki Sato, Satoru Takahashi, Takashi Miyoshi, Hiroki Shimizu, Manjiro Watanabe

研究成果: Article査読

3 被引用数 (Scopus)

抄録

This paper discusses a new probe technique, the so-called laser trapping probe, whose principle is based on the dynamic properties of optically trapped dielectric particles and the Linnik microscope interferometer. Computer simulations for trapping in air and theoretical analysis for interference fringe patterns are performed. By using the newly developed laser trapping probe experimental system, single-beam gradient-force optical traps of silica particles with the diameter of 8.0μm as microprobes are successfully demonstrated in air. And then, positional detection principle is established based on fringe changes with small displacement of the laser trapped probe sphere while approximating it to work surfaces. Measurement results for glass microspheres having NIST traceable mean diameter of 168±8.4μm show its potentials as the 3D nano-position sensing probe for nano-CMM.

本文言語English
ページ(範囲)1081-1086
ページ数6
ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
66
7
DOI
出版ステータスPublished - 2000 7月
外部発表はい

ASJC Scopus subject areas

  • 機械工学

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