The fabrication of integrated mass flow controllers

Masayoshi Esashi, Soohae Eoh, Tadayuki Matsuo, Segan Choi

研究成果: Chapter

抜粋

Two types of mass flow controller of which flow sensor and control valve are integrated on a silicon wafer were fabricated for fine gas control. One has a differential pressure type flow sensor and the other has a thermal flow sensor. Silicon micro valves which use small stack piezo actuator were developed for the control valve.

元の言語English
ホスト出版物のタイトルMicromechanics and MEMS
ホスト出版物のサブタイトルClassic and Seminal Papers to 1990
出版者Wiley-IEEE Press
ページ440-443
ページ数4
ISBN(電子版)9780470545263
ISBN(印刷物)0780310853, 9780780310858
DOI
出版物ステータスPublished - 1997 1 1

ASJC Scopus subject areas

  • Computer Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)
  • Energy(all)

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  • これを引用

    Esashi, M., Eoh, S., Matsuo, T., & Choi, S. (1997). The fabrication of integrated mass flow controllers. : Micromechanics and MEMS: Classic and Seminal Papers to 1990 (pp. 440-443). Wiley-IEEE Press. https://doi.org/10.1109/9780470545263.sect8