Testing of a probe for profile measurement of aspherical surface

Atsushi Shibuya, Yoshikazu Arai, Wei Gao, Satoshi Kiyono

研究成果: Paper査読

抄録

To test an air-bearing displacement probe for aspherical surface measurement, measurements at various contact angles are carried out. A laser interferometer is employed as the reference in the measurement. Two methods are also presented to measure the profile error of the probe sphere through scanning a sample sphere. In the first method, two repeated scanning is conducted along the redial direction of the sample sphere before and after a small rotation of the sample sphere. In the second and the sample sphere is scanned while it is rotated by the spindle. The profile error of the sample sphere can be separated by data processing in each of the method.

本文言語English
ページ331-334
ページ数4
出版ステータスPublished - 2005 12 1
イベント3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 - Nagoya, Japan
継続期間: 2005 10 192005 10 22

Other

Other3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005
国/地域Japan
CityNagoya
Period05/10/1905/10/22

ASJC Scopus subject areas

  • 産業および生産工学

フィンガープリント

「Testing of a probe for profile measurement of aspherical surface」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル