Y-Ba-Cu-O thin films were prepared at 800°C on yttria-stabilized zirconia substrates by chemical vapor deposition using β-diketonate chelates of Y, Ba, and Cu. An as-deposited film showed zero resistivity only at 10 K. When annealed at 450°C for 1 h in O2 atmosphere, zero resistivity was observed at 30 K. For a film with in-situ oxygen treatment during cooling after the deposition, the superconducting transition started at 83 K and zero resistivity was obtained at 43 K.
|ジャーナル||Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan|
|出版ステータス||Published - 1988|
ASJC Scopus subject areas
- 化学 (全般)