TEM study for self orientated LaNiO3 film along [100]

Naonori Sakamoto, Kotaro Ozawa, Kohei Murakoshi, Tomoya Ohno, Takanori Kiguchi, Takeshi Matsuda, Toyohiko Konno, Naoki Wakiya, Hisao Suzuki

研究成果: Conference contribution

抄録

LaNiO3 (LNO) is known as a candidate for oxide electrodes with perovskite type crystal structure which is suitable for lattice matching with conventional perovskite ferroelectrics, Pb(Zr,Ti)O3 (PZT), BaTiO 3 (BTO), etc. We have been investigating thermal expansion effects of the LNO film with PZT/LNO/Si and BTO/LNO/Si structures, where ferroelectric and piezoelectric properties are enhanced by a compressive thermals stress impressed from the LNO layer to the ferrelectric films. The ferroelectric films also shows high [001] orientation owing to [100] orientation of the LNO film. In the present study, further investigation of the LNO films prepared on Si substrates by CSD method is made by transmission electron microscopy (TEM) in order to understand self-orientation along [100] perpendicular to the film plane which effectively leads orientation of PZT films prepared on the LNO film. The results obviously indicates that the 1 layer deposited LNO film has almost no orientation, whereas it shows tendency of orientation of [100] perpendicular to the film plane when the layer number increased.

本文言語English
ホスト出版物のタイトルElectroceramics in Japan XVI
出版社Trans Tech Publications Ltd
ページ185-188
ページ数4
ISBN(印刷版)9783037858561
DOI
出版ステータスPublished - 2014
イベント32nd Electronics Division Meeting of the Ceramic Society of Japan - Tokyo, Japan
継続期間: 2012 10 262012 10 27

出版物シリーズ

名前Key Engineering Materials
582
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

Other32nd Electronics Division Meeting of the Ceramic Society of Japan
国/地域Japan
CityTokyo
Period12/10/2612/10/27

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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